206010057190 Respiratory tract infection Diseases 0.000 claims 2.FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 4.229910021332 silicide Inorganic materials 0.000 claims description 4.239000004065 semiconductor Substances 0.000 claims description 19.

238000002955 isolation Methods 0.000 claims abstract description 26.239000000758 substrate Substances 0.000 claims abstract description 63.230000005669 field effect Effects 0.000 title claims abstract description 8.Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority claimed from US24548509P external-priority Application filed by 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 filed Critical 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 Publication of KR20110033039A publication Critical patent/KR20110033039A/en Application granted granted Critical Publication of KR101295425B1 publication Critical patent/KR101295425B1/en Links ( en Inventor 펭 위안 흥밍 첸 충린 리 창윈 창 클레멘트 싱젠 완 Original Assignee 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 Priority date (The priority date is an assumption and is not a legal conclusion. Google Patents KR101295425B1 - A fin field effect transistor KR101295425B1 - A fin field effect transistor

Fin field effect transistor